Guest Editorial
Construction of Nonlinear Dynamic MEMS Component Models Using Cosserat Theory
Computer Aided Tolerance Analysis and Synthesis in Micro Systems (μ-ToAST)
Neural Network Approach for Linearization of the Electrostatically Actuated Double-Gimballed Micromirror
Modeling and Prediction of the Dynamic Behaviour of Microbeams Under Electrostatic Load
A New Approach of Lateral RF MEMS Switch
A Monolithic Interface Circuit for Gas Sensor Arrays