SENSITIVITY OF HOMOGENEITY MAPPING OF DIELECTRIC WAFER USING MILLIMETER WAVES

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Abstract

A plane electromagnetic wave normally falling on a surface of a dielectric plate has been considered to investigate the sensitivity of the dielectric constant homogeneity mapping in the dielectric wafer by measuring the phase and/or the amplitude of the millimeter wave reflected from or transmitted through it. Measurement conditions at which the highest sensitivity might be achieved are established. The sensitivity at Fabry-Perot resonance conditions as well as at frequency shifted from resonance has been considered.

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