A Distributed Temperature-Control System for a Single-Crystal Growth Apparatus

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Abstract

A distributed precision heat regulator designed for use in a single-crystal growth apparatus is described. The regulator is based on an S-type thermocouple and provides a temperature range of up to 1300°C with an absolute error of <0.6°C, a preset-temperature control accuracy of ∼0.1°C, and a temperature drift of 0.05°C/°C ambient temperature or lower.

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