BaTiO3 Films by Low-Temperature Hydrothermal Techniques for Next Generation Packaging Applications

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This work reports synthesis, characterization and integration of sub-micron thick nano-grained barium titanate films on organic Printed Wiring Boards (PWB). Barium titanate films were synthesized on titanium foils at 95°C. SEM of films revealed 80 nm grains. The films were characterized using XRD, FTIR and Raman spectroscopy. As-synthesized films exhibited high capacitance densities and dielectric loss. The films were treated with oxygen plasma to reduce entrapped hydroxyl groups and this resulted in improved dielectric properties. The plasma treated films exhibited a capacitance density of 1 μF/cm2 and a dielectric loss of 0.06. The high frequency dielectric properties were extracted from s-parameter measurements on CPW structures on these films and were found to be stable up to 8 GHz.

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