Development of a high energy resolution electron energy-loss spectroscopy microscope

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Abstract

Summary

We have developed a high energy resolution electron energy-loss spectroscopy (EELS) microscope, which can take spectra from specified small specimen areas and specified small reciprocal space areas to investigate detailed electronic structures. The EELS microscope is equipped with retarding Wien filters as the monochromator and the analyser. The filters are designed to achieve a stigmatic focus. The energy resolutions are 12 meV and 25 meV for cases without and with a specimen, respectively. Spatial and momentum resolutions are 30-110 nm in diameter and 1.1 nm−1 in angular diameter, respectively. EELS spectra are presented to show the performance of this instrument.

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