SENSITIVITY OF MOS SENSORS TOWARDS CHLORINE

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Abstract

The high sensitivity of metal-dielectric-semiconductor (MOS) sensors of the type Pd-Ta2O5-SiO2-Si towards chlorine is observed, and this makes it possible to measure its concentration at the level of 0.1 ppb. The sign of the MOS response to chlorine is opposite to that for hydrogen and hydrogen-containing gases. By means of pulsed heating there is a reduction by an order of magnitude in sensor response and recovery time.

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