Analysis of the metal layer thickness influence on the dispersion characteristics of acoustic waves propagating in the layered piezoelectric structure “Me/AlN/Me/diamond”

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Abstract

The paper presents the results of computer simulation of the acoustic waves propagation in piezoelectric layered structures based on diamond substrate under the influence of various metal film deposition. It has been observed that the maximum phase velocity change Δv/v is achieved with an “Au/(0 0 1) AlN/Au/(1 0 0) diamond” PLS configuration. However, if the acoustic impedance of the metal layer is greater than the acoustic impedance of the substrate, an elastic wave reflection can be observed, reducing the Δv/v quantities. Obtained results may be useful in the development of resonant and sensor acousto-electronic devices based on the Rayleigh and Love waves.

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