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The interaction of O2with Pd(110) has been studied by TDS and XPS at T = 400 K and at pressures PO2 from 2.6x10−6to 10 Pa. At low exposures in O2(∈ ≤ 1–5 L), an adsorption layer withqof ca. 0.5 and with the O1s peak at BE = 529.3 eV has been found to form on the surface. Whenegrows from 5 to 108 L, the position and intensity of the oxygen O1s peak remain practically constant. At the same time, as much as 5 mL of oxygen is absorbed according to the TDS data. The results obtained by TDS and XPS indicate that oxygen penetrates deep into the subsurface layers of palladium (≥15–20 Å) and is distributed in its bulk in a low concentration.