Characterization of a Quantum Well in an Si/Si1−x Ge x /Si Heterostructure by X-ray Diffractometry
Contact TiSi2and Barrier TiN Layers for ULSI Multilevel Metallization
Chemical Vapor Deposition of Silicon Oxynitride Films onto Silicon by the Pyrolysis of Hexamethyl Disilazane with Nitrogen-Containing Additives
Statistical Process Control in IC Manufacture
Interaction of a Microwave and a Low-Pressure Plasma under Electron Cyclotron Resonance
Adiabatic Logic Circuits
Synthesis Techniques for Masterslice Combinational Logic