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The lattice Boltzmann model is a simplified kinetic method based on the particle distribution function. We use this method to simulate problems in MEMS, in which the velocity slip near the wall plays an important role. It is demonstrated that the lattice Boltzmann method can capture the fundamental behaviors in micro-channel flow, including velocity slip, nonlinear pressure drop along the channel and mass flow rate variation with Knudsen number. The Knudsen number dependence of the position of the vortex center and the pressure contour in micro-cavity flows is also demonstrated.