Mutual conversion of bulk and surface acoustic waves in gratings of finite length on half-infinite substrates. I. FE analysis of surface wave generation

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Abstract

Highlights

★ The surface acoustic wave generation by a bulk acoustic wave is studied numerically. ★ The conversion occurs due to a grating area created on the surface of the substrate. ★ The substrate is a half-infinite anisotropic half-space without piezoeffect (silicon). ★ The finite element method is used.

A numerical study is carried out of the surface acoustic wave generation by a bulk acoustic wave in a half-infinite anisotropic half-space without piezoeffect. The efficient conversion of bulk waves into surface waves occurs due to a grating area created on the surface of the substrate. Our simulations are fully based on the finite element method. Given the incident bulk wave, we directly determine the amplitude of the surface wave and investigate its dependence on various parameters specifying the situation under consideration, such as the frequency and the polarization of the bulk wave, the length of the grating, the geometrical size of grooves or strips forming the grating.

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