Mutual conversion of bulk and surface acoustic waves in gratings of finite length on half-infinite substrates. II. FE analysis of bulk wave generation

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Abstract

Highlights

★ The bulk acoustic wave generation by a surface acoustic wave is studied numerically. ★ The conversion occurs due to a grating area created on the surface of the substrate. ★ The substrate is a half-infinite anisotropic half-space without piezoeffect (silicon). ★ The finite element method is used.

The paper studies numerically the bulk acoustic wave generation by the surface acoustic wave propagating across a grating created on the surface of an elastically anisotropic half-infinite substrate. The computations are fully based on the finite element method. Applying the discrete Fourier transformation to the displacement field found inside the substrate and using an orthogonality relation valid for plane modes we determine separately the spacial spectrum of the quasi longitudinal and the quasi transverse bulk waves, that is, the dependence of the amplitudes of these waves on the tangential component of the wave vector. The dependence is investigated of the central spectral peak height and shape on the frequency of the incident surface wave as well as on the thickness, the width, and the number of strips forming the grating. In particular, it is found that under certain conditions the central peak can be approximated fairly precisely by the central peak of a sinc-function describing the spectrum of the bounded acoustic beam of rectangular shape and of width equal to the length of the grating.

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